|
氣體 |
測量范圍 |
分辨率(針對缺省設(shè)置) |
|
乙醛 Acetaldehyde |
0-200 ppm |
1 ppm |
|
乙炔 Acetylene |
0-100 ppm |
1 ppm |
|
丙烯腈 Acrylonitrile |
0-100ppm |
1 ppm |
|
氨氣 Ammonia |
0-200 ppm |
1 ppm |
|
胂 Arsine |
0-20 ppm |
0.01 ppm (PH3) |
|
溴 Bromine |
0-20 ppm |
0.05 ppm (Cl2) |
|
丁二烯 Butadiene |
0-100 ppm |
1 ppm |
|
二氧化碳 Carbon Dioxide |
0-5% Vol. |
0.1% Vol. |
|
一氧化碳 Carbon Monoxide |
0-2000 ppm |
1 ppm |
|
一氧化碳 Carbon Monoxide |
0-10,000 ppm |
1 ppm |
|
氯氣 Chlorine |
0-20 ppm |
0.05 ppm |
|
二氧化氯 Chlorine Dioxide |
0-20 ppm |
0.05 ppm (Cl2) |
|
乙硼烷 Diborane |
0-1 ppm |
0.01 ppm (PH3) |
|
二乙胺 Diethylamine |
0-100 ppm |
1 ppm |
|
二甲胺 Dimethylamine |
0-100 ppm |
1 ppm |
|
二甲基硫醚 Dimethyl Sulfide |
0-40 ppm |
1 ppm |
|
乙醇 Ethanol |
0-300 ppm |
1 ppm |
|
乙烯 Ethylene |
0-100 ppm |
1 ppm |
|
環(huán)氧乙烷 Ethylene Oxide |
0-200 ppm |
1 ppm |
|
甲醛Formadehyde |
0-200 ppm |
1 ppm |
|
氟 Fluorine |
0-20 ppm |
0.05 ppm (Cl2) |
|
鍺烷Germane |
0-20 ppm |
0.01 ppm (PH3) |
|
氫氣 Hydrogen |
0-2000 ppm |
1 ppm |
|
氰化氫 Hydrogen Cyanide |
0-50 ppm |
0.1 ppm |
|
氟化氫/氯化氫Hydrogen Fluoride/Hydrogen Chloride(需配傳感器帽) |
0-30 ppm |
0.1 ppm (HCl) |
|
過氧化氫 Hydrogen Peroxide |
0-20 ppm |
0.1 ppm |
|
硒化氫 Hydrogen Selenide |
0-1 ppm |
0.01 ppm (PH3) |
|
硫化氫 Hydrogen Sulfide |
0-100 ppm |
1 ppm |
|
硫化氫 Hydrogen Sulfide |
0-1000 ppm |
1 ppm |
|
異丁烯 Iso-Butene |
0-300 ppm |
1 ppm |
|
異丙醇Iso-Propyl Alcohol |
0-300 ppm |
1 ppm |
|
甲醇 Methanol |
0-200 ppm |
1 ppm |
|
甲胺 Methyl Amine |
0-100 ppm |
1 ppm |
|
一氧化氮 Nitric Oxide |
0-200 ppm |
1 ppm |
|
二氧化氮Nitrogen Dioxide |
0-50 ppm |
0.1 ppm |
|
氧氣 Oxygen |
0-25% Vol. |
0.1% Vol. |
|
光氣 Phosgene |
0-3 ppm |
0.01 ppm |
|
磷化氫 Phosphine |
0-20 ppm |
0.01 ppm |
|
磷化氫 Phosphine |
0-1000 ppm |
1 ppm |
|
丙烯 Propylene |
0-100 ppm |
1 ppm |
|
氧化丙烯Propylene Oxide |
0-200 ppm |
0.5 ppm |
|
四氫化硅 Silane |
0-50 ppm |
0.01 ppm (PH3) |
|
苯乙烯 Styrene |
0-100 ppm |
1 ppm |
|
二氧化硫 Sulfur Dioxide |
0-100 ppm |
0.1 ppm |
|
四氫噻吩Tetrahydrothiophene |
0-40 ppm |
1 ppm |
|
特丁醇 tert-Butyl Mercaptan |
0-40 ppm |
1 ppm |
|
三乙胺 Triethylamine |
0-100 ppm |
1 ppm |
|
三甲胺 Trimethylamine |
0-100 ppm |
1 ppm |
|
乙烯基乙酸酯 Vinyl Acetate |
0-100 ppm |
1 ppm |
|
氯乙烯 Vinyl Chloride |
0-100 ppm |
1 ppm |